The objective of this project is to achieve high surface area silicon nanostructures for next generations of active and passive components with high integration density. The proposed route for the realization of nanostructures is to use masks based on inexpensive homopolymer mixtures and to transfer nanopatterns to silicon by plasma cryogravure.
Thèse : 1
Publication scientifique : 27
Procédé : 6
Rapport final : 3
Emplois crées : 6
Thèse : 2
Project leader
Member partner
Start of the project on08 / 06 / 2023 | End of project on08 / 06 / 2023
Strategic business lines
Électronique : matériaux, composants et sous-systèmes
Referent of the project
Sébastien DESPLOBAIN
07 86 53 38 74
sebastien.desplobain-s2e2-ext@st.com
Centre-Val de Loire
