The aim of this project is to create a thermoelectric oxide micro-generator integrated on a biocompatible porous silicon (Sipo) flexible membrane. The electrical power generated in contact with the skin will allow the charging of a micro-battery and the power supply of an autonomous sensor monitoring, for example, a vital function. The oxide films considered here are an alternative to bismuth tellurides, thermoelectric materials the most effective but toxic and scanty. However, their crystallization temperature above 500 ° C makes them incompatible with the polymer membranes used for electronic components on flexible support. The low-cost technology approach used here derives from that recently developed for the transfer of photovoltaic cells and allows the complete realization of the wafer Si component before the separation of the Sipo membrane. It allows the flexible membrane integration of ALL micro-electronic "high temperature" components, opening up areas of applications (flexible electronics such as smart cards, smart textiles, energy recovery ...) largely unexploited commercially. To carry out this project, GREMAN will rely on its expertise in combinatorial synthesis of thermoelectric oxides and micro-fabrication. ICMN brings its expertise in surface analysis. The start-up Silimixt has the know-how for the realization of SiPo membranes. The LIED will intervene for the optimization of the design. Finally STMicroelectronics develops Li micro-batteries to be associated with micro-generators.

Project benefits

Publication scientifique : 15

Suivi de projet - Pendant le projet : 10

Emplois crées : 10

Action de communication : 50

Produit / Prototype : 20

Rapport final : 5

Thèse : 5

People involved in the project

Project leader

Member partner

No member partner



Information of the project

Start of the project on28 / 05 / 2024 | End of project on28 / 05 / 2024

Strategic business lines

Bâtiments et territoires intelligents

Électronique : matériaux, composants et sous-systèmes

Referent of the project

Florentin BORÉ
Chargé de projets innovants

06 66 39 55 43


Centre-Val de Loire