Micro-machined capacitive ultrasonic transducers, commonly called cMUTs, are microsystems made from microelectronic technologies. Their main field of application is ultrasound imaging. These are great systems that can adapt to the complexity and miniaturization required today for ultrasound imaging applications. However, several factors limit their development, especially today related to the materials and processes used to design them. The main objective of this project is to develop a range of materials and processes "low temperature" innovative allowing the realization of a new generation of capacitive microsystems. In this context, we propose to evaluate the performance of devices manufactured on an original and restrictive application of the field of ultrasound: the realization of ultrasound array for high resolution imaging. The aim of this project is a "high frequency / low temperature" cMUT demonstrator that does not exist today due to the lack of suitable materials.

Project benefits

Suivi de projet - Fin du projet : 1

Publication scientifique : 10

Emplois crées : 2

Thèse : 2

Procédé : 2

Produit / Prototype : 4

Nouveau projet : 6

Action de communication : 2

Rapport final : 2

Suivi de projet - Fin du projet : 1

People involved in the project

No member partner


Information of the project

Start of the project on01 / 10 / 2010 | End of project on30 / 03 / 2014

Strategic business lines

Bâtiments intelligents

Matériaux et composants pour l'électronique

Referent of the project

Chargé de projets innovants

07 86 53 38 74

Centre-Val de Loire