MAT&MUT

Micro-machined capacitive ultrasonic transducers, commonly called cMUTs, are microsystems made from microelectronic technologies. Their main field of application is ultrasound imaging. These are great systems that can adapt to the complexity and miniaturization required today for ultrasound imaging applications. However, several factors limit their development, especially today related to the materials and processes used to design them. The main objective of this project is to develop a range of materials and processes "low temperature" innovative allowing the realization of a new generation of capacitive microsystems. In this context, we propose to evaluate the performance of devices manufactured on an original and restrictive application of the field of ultrasound: the realization of ultrasound array for high resolution imaging. The aim of this project is a "high frequency / low temperature" cMUT demonstrator that does not exist today due to the lack of suitable materials.