En cours

The aim of this project is to create a thermoelectric oxide micro-generator integrated on a biocompatible porous silicon (Sipo) flexible membrane. The electrical power generated in contact with the skin will allow the charging of a micro-battery and the power supply of an autonomous sensor monitoring, for example, a vital function. The oxide films considered here are an alternative to bismuth tellurides, thermoelectric materials the most effective but toxic and scanty. However, their crystallization temperature above 500 ° C makes them incompatible with the polymer membranes used for electronic components on flexible support. The low-cost technology approach used here derives from that recently developed for the transfer of photovoltaic cells and allows the complete realization of the wafer Si component before the separation of the Sipo membrane. It allows the flexible membrane integration of ALL micro-electronic "high temperature" components, opening up areas of applications (flexible electronics such as smart cards, smart textiles, energy recovery ...) largely unexploited commercially. To carry out this project, GREMAN will rely on its expertise in combinatorial synthesis of thermoelectric oxides and micro-fabrication. ICMN brings its expertise in surface analysis. The start-up Silimixt has the know-how for the realization of SiPo membranes. The LIED will intervene for the optimization of the design. Finally STMicroelectronics develops Li micro-batteries to be associated with micro-generators.

Retombées du projet

Suivi de projet - Pendant le projet : 15

Emplois crées : 10

Publication scientifique : 10

Personnes engagées sur le projet
Informations sur le projet

Début du projet le 11 / 05 / 2021 | Fin du projet le 11 / 05 / 2021

Domaines d'activité stratégiques

Matériaux et composants pour l'électronique

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